SM6295 - Silicon Microstructures

SM6295 Low Pressure Sensor

The SM6295-BCM-S-040-000 is an amplified analog, low pressure MEMS sensor offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce an analog, fully conditioned, pressure and temperature compensated sensor in a JEDEC standard SOIC-16 package with dual vertical porting. It is available in a gage pressure .

Features

• Pressure range from 0 to 40 cmH2O
• 5.0 V operation
• Amplified analog output (10 to 90%Vdd)
• Compensated temperature range: 0 to 60oC
• Gage pressure configuration
• Insensitive to mounting orientation
• Pressurized from backside to protect topside electronics DESCRIPTION The SM6295-BCM-S-040-000 is an amplified analog, low pressure MEMS sensor offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce an analog, fully conditioned, pressure and temperature compensated sensor in a JEDEC standard SOIC-16 package with dual vertical portin.