| No. | Partie # | Fabricant | Description | Fiche Technique |
|---|---|---|---|---|
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Aerotech |
Manual Linear Positioning Stage meter Spindle Sub-Micron Drive 12.5 mm (0.5 in) 1 micron (40 µin) 0.1 micron (4 µin) 25 nm 22.7 kg (50 lb) 9.09 kg (20 lb) 0.5 micron (±20 µin) 1 µm (20 nm) Aluminum Black Anodize 0.45 kg (1 lb) ATS25-25DM 25 mm (1 in) Straightness and Flatness of |
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