SM5420E - Silicon Microstructures

SM5420E Absolute Pressure Sensor

The SM5420E is a small outline SO8 packaged pressure sensor that incorporates SMI’s new SM5108E MEMS piezoresistive pressure sensing die. The SM5420E has been optimized to provide the highest possible stability for a package of this size. Performance is achieved through careful resistor placement and mechanical configuration along with advanced MEMS process.

Features

• Improved stability with integrated field shields
• Small SO8 surface-mount package
• 95 millivolt span
• Constant current or constant voltage drive
• Ported or non-ported configurations
• Wide operating temperature range (-40° to +125°C)
• Integrated die-level ESD protection
• Qualified using AEC-Q100 Grade 1 standards DESCRIPTION The SM5420E is a small outline SO8 packaged pressure sensor that incorporates SMI’s new SM5108E MEMS piezoresistive pressure sensing die. The SM5420E has been optimized to provide the highest possible stability for a package of this size. Performance is achieved .