MFC2030 - MEMSIC

MFC2030 High Performance Bi-Directional Digital MEMS Gas Flow Sensor

MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/3.0% accuracy. The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a.

Features

 Bi-directional flow (±30 or ±70SLM)
 High dynamic range
 ±3% m.v. accuracy
 ±0.8% m.v. repeatability
 Low power consumption
 Fast response time
 Single 2.7 - 5.5Vdc power supply
 Digital I2C output
 Standard push-in fitting sizes
 Custom fluid connector available
 Temperature compensated
 Highly configurable firmware
 Easy-to-use PC-based GUI
 RoHS and WEEE compliant APPLICATIONS
 Medical gas flow measurement and control
 Industrial gas flow measurement and control
 Consumer products DESCRIPTION MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s propr.